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主要特點
該款設備是全自動Plasma增強CVD系統(PECVD)，連續可控溫度以及Plasma強度等，配備真空系統，可以低壓條件下實現工藝，PECVD系統能使整個實驗腔體都處于輝光產生區，輝光相對均勻等效，很好的解決了傳統等離子工作不穩定狀態，該設備爐管可360°旋轉，有助于粉料的燒結更均勻，可大角度傾斜，方便進出料，傾斜角度在0-35°之間，所有物料經過的管道都選用非金屬材質，如：進出料腔體選用石英材質，推料桿選用石英及聚四氟材質。
The device is a fully automated Plasma Enhanced CVD System (PECVD) with continuous temperature control and Plasma strength. Equipped with a vacuum system that can be used under low pressure conditions. The PECVD system enables the entire experimental chamber to be in the glow generation area. The light is uniform and equivalent, which solves the unstable operation of the traditional plasma. The tube of the device can rotate 360°, which helps the sintering of the powder to be more uniform, can be inclined at a large angle, and is convenient for feeding and discharging. The inclination angle is Between 0-35°, all pipeline materials passing through are made of non-metallic materials. For example, the inlet and outlet chambers are made of quartz, and the push rods are made of quartz and PTFE.
技術參數
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加熱系統Heating system |
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功率Power |
4KW |
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電壓Voltage |
AC220V 50/60Hz |
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zui高溫度Max. Temp |
1200°C |
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使用溫度Working temp |
1100°C |
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加熱長度Heating zone length |
200mm+200mm |
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恒溫長度Constant zone length |
250mm |
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PID automatic control and auto-tune function. 模糊PID控制和自整定調節 30 programmable segments for precise thermal processing. 智能化30段可編程控制 Built-in protection for the over-heated and broken thermocouple. 超溫和斷偶報警功能 Operation interface is10 "LCD touch screen control 操作界面為10 "液晶觸摸屏控制 |
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控溫精度Temperature Accuracy |
+/- 1℃ |
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爐管尺寸Tube Size |
Size：Φ60*420+Φ100*360+Φ60*420mm 尺寸：Φ60*420+Φ100*360+Φ60*420mm Furnace tube rotation rate：0~60r/min 爐管轉速：0~60r/min |
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Furnace body inclination angle |
0~35°（adjustable） |
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Plasma系統Plasma system |
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本系統借助于輝光放電產生等離子體，輝光放電等離子體中，電子密度高，通過反應氣態放電，有效利用了非平衡等離子體的反應特征，從根本上改變了反應體系的能量供給方式。 |
The system generates plasma by means of glow discharge. In the glow discharge plasma, the electron density is high, and the reaction characteristics of the non-equilibrium plasma are effectively utilized by the reaction gas discharge, which fundamentally changes the energy supply mode of the reaction system. |
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進料系統Feeding system |
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送料系統速度連續可調，停止送料且爐體傾斜zui大時，物料不會從送料系統外漏，送料系統方便拆卸，拆卸后可手動加料，設備可正常運行。 |
The speed is continuously adjustable. When the feeding is stopped and the furnace body is tilted to the maximum, the material will not leak . The feeding system is easy to disassemble, and the material can be manually fed after disassembly, and the equipment can operate normally. |
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出料系統Discharge system |
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出料系統在爐體傾斜出料時可自動出料。） |
The discharging system can automatically discharge when the furnace body is inclined and discharged. |
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氣體控制系統Gas control system |
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該控氣系統是可以控制兩種氣體按照不同流量進行混合配比的，也可以獨立控制，質量流量計安裝于密封的可移動的機柜內，由超潔雙拋不銹鋼管與精密雙卡套接頭連接組成。 |
The gas control system can control the mixing ratio of the two gases according to different flow rates, and can also be independently controlled. The mass flow meter is installed in a sealed movable cabinet, which is composed of super clean stainless steel tube and the precision double ferrule joint.
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低真空系統Low vacuum system |
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該系統配備真空機械泵，可以抽真空，可以讓設備在真空環境下進行反應。
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Equipped with a vacuum mechanical pump that can be vacuumed to allow the unit to react in a vacuum environment. |
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氣料分離系統Separation system |
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該系統可以讓設備在充氣體保護或者抽真空時，實現氣體與物料的分離。 |
the system allows the separation of gas and material during the protection of the inflator or when vacuuming.
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過濾系統filtering system |
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該系統可防止物料進入真空泵，保證真空泵的正常運行。 |
The system prevents material from entering the vacuum pump and ensures proper operation of the vacuum pump. |
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爐管轉動系統Furnace tube rotation system |
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爐管轉動系統可以讓爐管360°勻速轉動，轉速在0-60r/min連續可調，且能在60r/min轉速下長時間運行。 |
Allows the tube to rotate 360° at a constant speed. The rotation speed is continuously adjustable from 0 to 60 r/min for a long time. |
